In this paper a new rf mems switch is presented 238 b schauwecker et al : a new type of high bandwidth rf mems switch - toggle switch in a microstrip or coplanar environment witch can be opened or closed for this, part of the signal line consists metal band fig 7 simulation model of the toggle-switch c. A novel rf mems switch architecture has been proposed, for v-band operation and intended for use in high power applications it has many inherent advantages, in terms of relatively high rf signal power handling and broadband on-state. A number of structures have been reported in the literature for the capacitive switches having good rf performance however, these devices lags in multi-band functionality [16, 17, 18, 19]another approach based on series and shunt switches combination results in higher insertion loss and larger chip [20, 21]this work presents a novel capacitive shunt rf-mems switch. J comput electron (2015) 14:167–179 doi 101007/s10825-014-0636-2 design and ﬁnite element modeling of series-shunt conﬁguration based rf mems switch for high isolation operation in k–ka band. This paper presents the design & modeling of distributed mems phase shifter for ka band rf systems the phase shift can be achieved by periodically placing the mems bridge variable capacitors as per bragg frequency criteria on coplanar waveguide (cpw) using gaas substrate.
Design and fabrication of rf-mems switch for v-band reconfigurable application t m vu1,2,, g prigent1,2, j ruan3,4, and r plana3,4 rf mems modeling 221 inline dc contact mems series switch conception the general circuit model for this type of mems is presented in. The series-shunt rf mems switch exhibits very high isolation ( 40 db), low loss ( 035 db) and good matching up to 12 ghz the structure-based small-signal model for the 3-port ohmic mems switch is developed and parameters are extracted based on the measured results. Novel rf mems switch with novel mechanical structure modeling design and modeling of a novel rf mems series switch with low actuation voltage khadeijeh khodadady and bahram azizolla ganji-exploring isospectral cantilever beams for all frequency bands of interest.
Abstract: this paper presents modeling, design, fabrication, and measurement of a novel shunt capacitive rf mems switch the switches are processed on a polyimide substrate in an intermediate layer of a monolithically processed vertically interconnected 3d-ic phased array antenna module at x-band. Microelectromechanical systems (mems) especially switches for radio frequencies (rf) are gaining high market potential from few years because of their excellent rf performance in different bands. Rf mems switch is shown in figure 1b, and the size is shown in table 1 the beam thickness is 1 m the air gap between the rf mems switch beam and the signal lines is 15 m. Abstract: this paper presents a unique model of shunt capacitive microelectromechanical switch which works at rf frequency (12-18 ghz) with low insertion loss and high isolation low actuation voltage, removal of stiction and making a switch to work at ku band frequency are main goals of this design. High power rf mems switch technology dr jia-sheng hong heriot-watt university the switch is designed for operation at x-band when all the switching elements are pulled down, electromechanical modelling (simple model @ d1=3um) •when v = 77 v, the beam or the contact b makes the first rf contact.
Reconfigurable rf mems bandpass filter 1 northeastern university eece 7244 introduction to microelectromechanical systems (mems) fall 2013 project name: reconfigurable rf mems bandpass filter adviser: m rinaldi group number: iv yuan li, zinan xiong, cunzheng dong, wei wei, ziliang zhang based on microelectromechanical system (mems) fast growing technology, the devices has smaller dimensions. Rf switch design emily wagner petro papi 41 using ads to create a full switch model figure 11 a typical cellular rf frontend showing a 9 throw switch from a common antenna modern devices have multiple antennas permitting the use of multiple functions at once [2. Common mems switch types are a thin metal cantilever, air bridge, diaphragm, or some other structure electrically configured in series or parallel with an rf transmission line and designed to open the line or shunt it to ground upon actuation of the mems.
Design, simulation of rf mems series switch upto s band 206 wwwerpublicationorg iii. 520 ieee microwave and guided wave letters, vol 9, no 12, december 1999 ka-band rf mems phase shifters b pillans, s eshelman, a malczewski, j ehmke, and c goldsmith abstract— as the need for low-loss phase shifters increases, so quarter-wave stub to the center of the rf mems switch. The m1c06-cdk2 rf mems switch developed the model 310-020022-001 is an amplified switch filter bank consisting of nine selectable rf frequency bands covering a range of 20 to 500 mhz the critical performance parameters for the.
Intellisuite software was used to model and simulate the rf mems seesaw switch similar designs such as j m cabral & a s holmes  and k jongseok et al , have been rx and tx for two distinct rf frequency bands this in turn, provides a dual rx/tx switch with a rf mems dpdt switch. Jain et al:physics-based predictive modeling framework for dielectric charging and creep 421 fig 2 (a) schematic of the mems switch showing charge injection into the bulk traps inside the dielectric when ﬁxed-ﬁxed beam is pulled-in (b) the. Achieve tunablity in frequency band, mems shunt switch has been designed above cpw two anchors of the bridge is fixed on ground plane and the metal bridge is suspended over the signal line of cpw. The answer, according to san jose, calif-based cavendish kinetics, is the company's tunable rf mems technology that provides 3g and 4g networks with improved rf communication the company has raised a $10 million financing round with qualcomm and other investors.
Efficient multi-physics modeling of the dynamic response of rf-mems switches efficient multi-physics modeling of the dynamic response of rf-mems switches rf-mems capacitive switch • plate suspended by beams above bottom electrode covered with efficient multi-physics modeling of the dynamic response of rf-mems switches outlook. Rf mems devices mems switch and tunable capacitor dr jeffrey denatale, manager, mems department high band multi-band (x, ku) amplifier 2-pole mems switched filter sp4t routing network • well-characterized rf device models. Design and modeling of rf mems phase shifters using various structures of coplanar waveguides sugesh m s1, rf mems, capacitive shunt switch 1 introduction phase shifter is a key component of phased wide frequency band, low insertion loss, and so on decreasing the loss for an array of phase shifters can. The paper is organized as follows: section 2 introduces the switchable stop- band filter based on rf-mems metamaterials the proposed electrical model of the filter is presented in section 3, while the comparison between the experimental results and simulations is discussed in section 4.